High-precision quartz glass and Silicon Products
 Techno Quartz provides high-precision quartz glass, silicon and ceramic products primarily used in semiconductor and LCD（Liquid Crystal Display） manufacturing equipment, and analytics equipment.
◆Vertical Quartz Boat◆
Vertical Quartz Boat for semiconductor manufacturing equipment. Various vertical and horizontal shapes are available.
◆Quartz Pedestal◆
Parts of any shape can be produced by welding together quartz rod or tubes.
◆Bell Jar◆
High-precision welded bell jar with minimized variation in thickness.
◆Gas Distribution Plate◆
A quartz plate with precisely drilled holes. Can also handle precise drilling of minute φ0.1-mm holes.
◆Quartz Ring◆
Ring products can be manufactured in various forms and shapes.
◆Quartz Reaction Tube◆
Various large size reactor tubes for 300mm wafers process can be manufactured.

Single crystal silicon products used in semiconductor and FPD（Flat panel displays） manufacturing processes.
Materials such as poly-crystalline silicon are used for large parts.
◆Si Gas Shower Plate◆
This silicon plate is drilled with precision holes.
Micro deep hole drilling with a high aspect ratio is also possible.
◆Si Ring◆
Ring products can be manufactured in various shapes.


Microfabrication Technology
◆Sample introduction chip with 4 channels◆ ◆Dicing Saw Grooves◆
Capable of forming three-dimensional micro-channels and small holes using ultra-precise machining, we can provide machining solutions for any conceptual idea.
 << Applications >>
    Microchip / Micro Reactor / Micro Mixer
Using a unique bonding technology, we can manufacture microchips with high pressure-resistant strength.
◆Download brochure

Cleaning Services
 Contract cleaning services started in September 2007
<<Processes that can be cleaned>>
  ・CVD
 ・Sputtering
 ・Ion Milling
 ・Dry Etching (semiconductors and
LCD (liquid crystal displays))
 ・Epitaxｙ
Please contact us for other processes.
  Parts Materials：
  Ceramics, silicon,
  metals (SUS, Al, Hastelloy),
  Coated products (such as anodized aluminum)
<< Actual Examples of Cleaning >>
   Depending on the type of film, film deposited on the surface of ceramic and metal parts used in a deposition process such as CVD can be removed. Using cleaning methods that do as little damage as possible to the base material, this is useful when initial surface needs to be maintained.

CVD Yttria Coated Parts
CVD Yttria is a transparent protective film with excellent anti-plasma characteristics.  
Dense and highly adhesive, CVD Yttria is highly effective when used as a protective film on windows used in the plasma treatment processes (type F and type Cl).  
◆Download brochure
 
 

◆Please feel free to contact us with any questions.
Contact:


Sales Department (Tokyo Office)
 Idemitsu Nishishinjyuku Bldg
 5-1-14 Nishishinjyuku Shinjyuku-ku, Tokyo ,Japan
Headquarters Tel.
Fax. 		+81-3-5351-0751
+81-3-5351-0761
　　　　　　　　　　Copyright (C) 2005 Techno Quartz Inc. All rights reserved.